Journal of Microelectromechanical Systems
Journal of Microelectromechanical Systems > 2016 > 25 > 1 > 144 - 152
Journal of Microelectromechanical Systems > 2016 > 25 > 1 > 207 - 216
Journal of Microelectromechanical Systems > 2016 > 25 > 1 > 118 - 124
Journal of Microelectromechanical Systems > 2016 > 25 > 1 > 108 - 117
Journal of Microelectromechanical Systems > 2016 > 25 > 1 > 125 - 133
Journal of Microelectromechanical Systems > 2016 > 25 > 1 > 2 - 10
Journal of Microelectromechanical Systems > 2016 > 25 > 1 > 78 - 90
Journal of Microelectromechanical Systems > 2016 > 25 > 1 > 227 - 235
Journal of Microelectromechanical Systems > 2016 > 25 > 1 > 170 - 178
Journal of Microelectromechanical Systems > 2016 > 25 > 1 > 153 - 159
Journal of Microelectromechanical Systems > 2016 > 25 > 1 > 160 - 169
Journal of Microelectromechanical Systems > 2016 > 25 > 1 > 188 - 196
Journal of Microelectromechanical Systems > 2016 > 25 > 1 > 134 - 143
Journal of Microelectromechanical Systems > 2016 > 25 > 1 > 30 - 37
Journal of Microelectromechanical Systems > 2016 > 25 > 1 > 91 - 100
Journal of Microelectromechanical Systems > 2016 > 25 > 1 > 217 - 226
Journal of Microelectromechanical Systems > 2016 > 25 > 1 > 197 - 206
Journal of Microelectromechanical Systems > 2016 > 25 > 1 > 179 - 187
Journal of Microelectromechanical Systems > 2016 > 25 > 1 > 101 - 107
Journal of Microelectromechanical Systems > 2016 > 25 > 1 > 11 - 29